High-voltage kV-class AlN metal-semiconductor field-effect transistors on single-crystal AlN substrates
This letter reports the demonstration and electrical characterization of high-voltage AlN metal-semiconductor field-effect transistors (MESFETs) on single-crystal AlN substrates. Compared with AlN MESFETs on foreign substrates, the AlN-on-AlN MESFETs showed high breakdown voltages of over 2 kV for d...
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| Autores principales: | , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
IOP Publishing
2024-01-01
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| Colección: | Applied Physics Express |
| Materias: | |
| Acceso en línea: | https://doi.org/10.35848/1882-0786/ad85c0 |
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