Super-resolution three-dimensional structured illumination profilometry for in situ measurement of femtosecond laser ablation morphology
Femtosecond laser ablation has found wide-ranging applications in the surface structuring of nanoelectronics and nanophotonics devices. Traditionally, the inspection of the fabricated three-dimensional (3D) morphology was performed using a scanning electron microscope or atomic force microscopy in a...
Sábháilte in:
| Príomhchruthaitheoirí: | , , , , , , , , , |
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| Formáid: | Artigo |
| Teanga: | Inglês |
| Foilsithe / Cruthaithe: |
AIP Publishing LLC
2023-10-01
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| Sraith: | APL Photonics |
| Rochtain ar líne: | http://dx.doi.org/10.1063/5.0165363 |
| Clibeanna: |
Níl clibeanna ann, Bí ar an gcéad duine le clib a chur leis an taifead seo!
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