Super-resolution three-dimensional structured illumination profilometry for in situ measurement of femtosecond laser ablation morphology
Femtosecond laser ablation has found wide-ranging applications in the surface structuring of nanoelectronics and nanophotonics devices. Traditionally, the inspection of the fabricated three-dimensional (3D) morphology was performed using a scanning electron microscope or atomic force microscopy in a...
محفوظ في:
| المؤلفون الرئيسيون: | , , , , , , , , , |
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| التنسيق: | Artigo |
| اللغة: | Inglês |
| منشور في: |
AIP Publishing LLC
2023-10-01
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| سلاسل: | APL Photonics |
| الوصول للمادة أونلاين: | http://dx.doi.org/10.1063/5.0165363 |
| الوسوم: |
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