In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry
We describe and discuss the optical design of a diffractometer to carry out in-line quality control during roll-to-roll nanoimprinting. The tool measures diffractograms in reflection geometry, through an aspheric lens to gain fast, non-invasive information of any changes to the critical dimensions o...
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| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
AIP Publishing LLC
2018-05-01
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| coleção: | APL Materials |
| Acesso em linha: | http://dx.doi.org/10.1063/1.5011740 |
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