A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing
This paper presents a low-power hybrid thermopneumatic microvalve with an electrostatic hold and integrated valve plate position sensing. This combination of actuators in a single structure enables a high throw and force actuator with low energy consumption, a combination that is difficult to otherw...
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| Principais autores: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2012-04-01
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| Colecção: | Micromachines |
| Assuntos: | |
| Acesso em linha: | http://www.mdpi.com/2072-666X/3/2/379 |
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