Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching

Metal-assisted chemical etching (MACE) is widely used to fabricate micro-/nano-structured Si owing to its simplicity and cost-effectiveness. The technique of magnetically guided MACE, involving MACE with a tri-layer metal catalyst, was developed to improve etching speed as well as to adjust the etch...

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Hlavní autoři:	Tae Kyoung Kim, Jee-Hwan Bae, Juyoung Kim, Min Kyung Cho, Yu-Chan Kim, Sungho Jin, Dongwon Chun
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2020-07-01
Edice:	Micromachines
Témata:	magnetically guided metal-assisted chemical etching bulk Si etching curved Si structure catalyst encapsulation
On-line přístup:	https://www.mdpi.com/2072-666X/11/8/744
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