Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone
Abstract We present a miniaturised thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. An active sens...
שמור ב:
| Principais autores: | , , , , |
|---|---|
| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
Nature Portfolio
2022-02-01
|
| סדרה: | Scientific Reports |
| גישה מקוונת: | https://doi.org/10.1038/s41598-022-05613-0 |
| תגים: |
אין תגיות, היה/י הראשונ/ה לתייג את הרשומה!
|