Piezoelectric and ferroelectric measurements on casted target-deposited Al0.45Sc0.45B0.1N thin films
This study reports on the characterization of a 45% scandium-doped Aluminum Nitride (AlScN) thin films co-doped with 10% Boron (B). AlScBN thin films were deposited on Si (100) 200 mm wafers using a pulsed DC reactive magnetron sputtering system. A 4″ casted alloy target of Al0.45Sc0.45B0.10 was use...
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| 主要な著者: | , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Frontiers Media S.A.
2025-04-01
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| シリーズ: | Frontiers in Materials |
| 主題: | |
| オンライン･アクセス: | https://www.frontiersin.org/articles/10.3389/fmats.2025.1567614/full |
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