Computer Simulation of Ion Bombardment of Targets Based on Double Glow Plasma Surface Alloying
The generation and transport process of bombardment ions and the sputtering process of ions on target are important parts to realize double glow plasma metallization. In this paper, on the basis of the glow discharge theory and COMSOL Multiphysics software, a typical double glow plasma metalizing de...
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| Autores principales: | , , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Editorial Office of Journal of Taiyuan University of Technology
2023-01-01
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| Colección: | Taiyuan Ligong Daxue xuebao |
| Materias: | |
| Acceso en línea: | https://tyutjournal.tyut.edu.cn/englishpaper/show-2014.html |
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