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Computer Simulation of Ion Bombardment of Targets Based on Double Glow Plasma Surface Alloying

The generation and transport process of bombardment ions and the sputtering process of ions on target are important parts to realize double glow plasma metallization. In this paper, on the basis of the glow discharge theory and COMSOL Multiphysics software, a typical double glow plasma metalizing de...

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-д хадгалсан:
Номзүйн дэлгэрэнгүй
Үндсэн зохиолчид: Xiang LI, Linhai TIAN, Xiaohong YAO, Naiming LIN, Zhenxia WANG, Lin QIN, Yucheng WU
Формат: Artigo
Хэл сонгох:Inglês
Хэвлэсэн: Editorial Office of Journal of Taiyuan University of Technology 2023-01-01
Цуврал:Taiyuan Ligong Daxue xuebao
Нөхцлүүд:
Онлайн хандалт:https://tyutjournal.tyut.edu.cn/englishpaper/show-2014.html
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