Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morph...

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Bibliografiske detaljer

Principais autores:	Harald Plank, Robert Winkler, Christian H. Schwalb, Johanna Hütner, Jason D. Fowlkes, Philip D. Rack, Ivo Utke, Michael Huth
Format:	Artigo
Sprog:	Inglês
Udgivet:	MDPI AG 2019-12-01
Serier:	Micromachines
Fag:	scanning probe microscopy atomic force microscopy tip fabrication nano-printing focused electron beam-induced deposition 3d printing nano-fabrication additive manufacturing
Online adgang:	https://www.mdpi.com/2072-666X/11/1/48
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