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Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures

Powder-based techniques are gaining increasing interest for the fabrication of microstructures on planar substrates. A typical approach comprises the filling of a mold pattern with micron-sized particles of the desired material, and their fixation there. Commonly powder-loaded pastes or inks are fil...

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Autori principali: Cris Kostmann, Thomas Lisec, Mani Teja Bodduluri, Olaf Andersen
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI AG 2021-09-01
Serie:Micromachines
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Accesso online:https://www.mdpi.com/2072-666X/12/10/1176
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