Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror
In this paper, the effect of driving system on working performance of electromagnetic integrated scanning micromirror (ISM) is studied. To further improve the optimization design of the electromagnetic ISM, the detailed theoretical analysis, simulation analysis, and experimental test are carried out...
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| Autori principali: | , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2021-10-01
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| Serie: | Micromachines |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2072-666X/12/10/1213 |
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