MEMS Enabled Bendable and Stretchable Silicon Circuits
We report the design and implementation of a unique, wafer sized stretchable and bendable monolithic silicon matrix structure. The achieved stretchability allows for simultaneous omnidirectional folding, required to conform the structure to complex curved 3D surfaces. Moreover, it also enables dynam...
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| Hauptverfasser: | , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2018-12-01
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| Schriftenreihe: | Proceedings |
| Schlagworte: | |
| Online-Zugang: | https://www.mdpi.com/2504-3900/2/13/837 |
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