A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring
In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an acoustic m...
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| Главные авторы: | , , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI AG
2023-03-01
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| Серии: | Micromachines |
| Предметы: | |
| Online-ссылка: | https://www.mdpi.com/2072-666X/14/3/654 |
| Метки: |
Нет меток, Требуется 1-ая метка записи!
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