A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring

In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an acoustic m...

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Autores principales:	Baoyu Zhi, Zhipeng Wu, Caihui Chen, Minkan Chen, Xiaoxia Ding, Liang Lou
Formato:	Artigo
Lenguaje:	Inglês
Publicado:	MDPI AG 2023-03-01
Colección:	Micromachines
Materias:	MEMS hydrophone PMUT leak detection leak localization
Acceso en línea:	https://www.mdpi.com/2072-666X/14/3/654
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