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Micromachining Techniques for Fabrication of Micro and Nano Structures
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...
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| 団体著者: | |
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| フォーマット: | Livro |
| 言語: | Inglês |
| 出版事項: |
IntechOpen
2012
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| 主題: | |
| オンライン･アクセス: | https://directory.doabooks.org/handle/20.500.12854/65516 |
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