In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

door Krause, Bärbel, Kuznetsov, Dmitry S., Yakshin, Andrey E., Ibrahimkutty, Shyjumon, Baumbach, Tilo, Bijkerk, Fred
Gepubliceerd in J Appl Crystallogr (2018)