Voltage distribution over capacitively coupled plasma electrode for atmospheric-pressure plasma generation

Por Shuto, Mitsutoshi, Tomino, Fukumi, Ohmi, Hiromasa, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Publicado em 2013

Interface properties of SiO(x)N(y) layer on Si prepared by atmospheric-pressure plasma oxidation-nitridation

Por Zhuo, Zeteng, Sannomiya, Yuta, Kanetani, Yuki, Yamada, Takahiro, Ohmi, Hiromasa, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Publicado em 2013