Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography

Por Seong Ju Wi, Yong Ju Jang, Haneul Kim, Kyeongjae Cho, Jinho Ahn
Publicado em 2022-03-01

Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source

Por Yong Chan Jung, Su Min Hwang, Dan N. Le, Aswin L. N. Kondusamy, Jaidah Mohan, Sang Woo Kim, Jin Hyun Kim, Antonio T. Lucero, Arul Ravichandran, Harrison Sejoon Kim, Si Joon Kim, Rino Choi, Jinho Ahn, Daniel Alvarez, Jeff Spiegelman, Jiyoung Kim
Publicado em 2020-07-01