Integration of Trench-Isolated Through-Wafer Interconnects with 2D Capacitive Micromachined Ultrasonic Transducer Arrays

Por Zhuang, Xuefeng, Ergun, Arif S., Huang, Yongli, Wygant, Ira O., Oralkan, Omer, Khuri-Yakub, Butrus T.
Publicado em 2007

Efficient Array Design for Sonotherapy

Por Stephens, Douglas N., Kruse, Dustin E., Ergun, Arif S., Barnes, Stephen, Ming Lu, X., Ferrara, Katherine
Publicado em 2008