Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

door Ren, Dongxu, Zhao, Huiying, Zhang, Chupeng, Yuan, Daocheng, Xi, Jianpu, Zhu, Xueliang, Ban, Xinxing, Dong, Longchao, Gu, Yawen, Jiang, Chunye
Gepubliceerd in Sensors (Basel) (2016)