Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

ανά Ren, Dongxu, Zhao, Huiying, Zhang, Chupeng, Yuan, Daocheng, Xi, Jianpu, Zhu, Xueliang, Ban, Xinxing, Dong, Longchao, Gu, Yawen, Jiang, Chunye
Τόπος έκδοσης Sensors (Basel) (2016)