Učitavanje...
Micromachining of stabilised porous silicon with several morphological features
A micromachining process on stabilised luminescent porous silicon (PS) using KOH was performed, for the purpose of using it in microstructures fabrication. A selective etching process using KOH aqueous solutions was developed to isolate luminescent PS regions with controlled geometrical features. As...
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| Izdano u: | Superficies y vacío |
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| Glavni autori: | , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Teme: | |
| Online pristup: | https://www.redalyc.org/articulo.oa?id=94200962 |
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