Methods Employed in Optical Emission Spectroscopy Analysis: a Review
In this work, different methods employed for the analysis of emission spectra are presented. The proposal is to calculate the excitation temperature (Texc), electronic temperature (Te) and electron density (ne) for several plasma techniques used in the growth of thin films. Some of these techniques...
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| Опубліковано в:: | Ingeniería y Ciencia |
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| Автори: | , , |
| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
Universidad EAFIT
2015
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| Предмети: | |
| Онлайн доступ: | https://www.redalyc.org/articulo.oa?id=83533766012 |
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