Modulation of argon pressure as an option to control transmittance and resistivity of ZnO:Al films deposited by DC magnetron sputtering: on the dark yellow films at 10−7 Torr base pressures
In a previous paper, we reported that thin films of ZnO:Al [aluminum-zinc oxide (AZO)] deposited after achieving a very low base pressure [from 4.0 × 10−7 Torr (5.6 × 10−5 Pa) to 5.7 × 10−7 Torr (7.6 × 10−5 Pa)] result dark yellow in color and are resistive. These are undesirable characteristics for...
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| Wydane w: | Revista Mexicana de Física |
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| Główni autorzy: | , , , , , , , , , |
| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
Sociedad Mexicana de Física A.C.
2018
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| Hasła przedmiotowe: | |
| Dostęp online: | https://www.redalyc.org/articulo.oa?id=57082916004 |
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