Multipactor suppressing titanium nitride thin films analyzed through XPS and AES
Cathodic-magnetron-deposited titanium nitride films were grown on anodized aluminum substrates and studied via AES and XPS spectroscopiesto determine their depth-dependence composition. As it is well known, the native oxide grown on aluminum does not make thesubstrate impervious to radio frequency d...
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| Publicado no: | Revista Mexicana de Física |
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| Principais autores: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Física A.C.
2008
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=57054109 |
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