Synthesis of self-assembled Ge nanocrystals employing reactive RF sputtering
This work presents the results of a simple methodology able to control crystal size, dispersion and spatial distribution of germanium nanocrys- tals (Ge-NCs). It takes advantage of a self-assembled process taken place during the deposit of the system SiO 2 /Ge/SiO 2 by reactive RF sputtering. Nanop...
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| Pubblicato in: | Revista Mexicana de Física |
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| Autori principali: | , , , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Sociedad Mexicana de Física A.C.
2016
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| Soggetti: | |
| Accesso online: | https://www.redalyc.org/articulo.oa?id=57048164010 |
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