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Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
Plasma-assisted techniques have been widely used for deposition of high quality thin films and metallurgical coatings. The glow plasma produced in the region between the electrodes and the chamber wall of a cathodic arc was modeled. The plasma behavior was characterized for different cathode materia...
Bewaard in:
| Gepubliceerd in: | Dyna |
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| Hoofdauteurs: | , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Universidad Nacional de Colombia
2018
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| Onderwerpen: | |
| Online toegang: | https://www.redalyc.org/articulo.oa?id=49655628009 |
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