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XPS STRUCTURE ANALYSIS OF TiN/TiC BILAYERS PRODUCED BY PULSED VACUUM ARC DISCHARGE

TiN/TiC Bilayers were grown on 304 stainless steel substrates using physical vapour deposition assisted by pulsed arc plasma system (PAPVD) at two substrate temperatures (50º C and 150º C). X ray photoelectron spectroscopy (XPS) was used to analyze the chemical composition by observing the behaviou...

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Main Authors: ELISABETH RESTREPO PARRA, PEDRO JOSE ARANGO ARANGO, VICENTE JAVIER BENAVIDES PALACIO
Formáid: Artigo
Teanga:Inglês
Foilsithe: Universidad Nacional de Colombia 2010
Ábhair:
XPS
Rochtain Ar Líne:https://www.redalyc.org/articulo.oa?id=49615099008
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