XPS STRUCTURE ANALYSIS OF TiN/TiC BILAYERS PRODUCED BY PULSED VACUUM ARC DISCHARGE

TiN/TiC Bilayers were grown on 304 stainless steel substrates using physical vapour deposition assisted by pulsed arc plasma system (PAPVD) at two substrate temperatures (50º C and 150º C). X ray photoelectron spectroscopy (XPS) was used to analyze the chemical composition by observing the behaviou...

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Bibliografske podrobnosti
izdano v:Dyna
Main Authors: ELISABETH RESTREPO PARRA, PEDRO JOSE ARANGO ARANGO, VICENTE JAVIER BENAVIDES PALACIO
Format: Artigo
Jezik:Inglês
Izdano: Universidad Nacional de Colombia 2010
Teme:
Ingeniería
XPS
PAPVD
stoichiometry
depth profiles
chemical composition
Online dostop:https://www.redalyc.org/articulo.oa?id=49615099008
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