Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus
This work presents the design and fabrication of two different vacuum chuck systems for a spin-coater apparatus. One of the vacuum chuck designs considered was sealed with toric joints and the other was sealed with bearings. These vacuum chucks were adapted to a DC brushless motor which has a non-pe...
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| Yayımlandı: | Journal of Applied Research and Technology |
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| Asıl Yazarlar: | , , |
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Universidad Nacional Autónoma de México
2020
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| Konular: | |
| Online Erişim: | https://www.redalyc.org/articulo.oa?id=47471661002 https://www.redalyc.org/journal/474/47471661002/ https://www.redalyc.org/journal/474/47471661002/html/ https://www.redalyc.org/journal/474/47471661002/47471661002.epub https://www.redalyc.org/journal/474/47471661002/movil |
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