Adherent Diamond-Like Carbon Coatings on Metals Via PECVD and IBAD
Adherent and low-stress a-C:H films were deposited on Ti6Al4V and stainless steel substrates using PECVDand IBAD techniques. An amorphous silicon interlayer was applied to improve the adhesion of the a-C:Hfilms on the metal substrates. The XPS technique was employed to analyze the chemical bondings...
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| Udgivet i: | Brazilian Journal of Physics |
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| Principais autores: | , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Sociedade Brasileira de Física
2006
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| Online adgang: | https://www.redalyc.org/articulo.oa?id=46436550 |
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