Two dimensional computer simulation of plasma immersion ion implantation
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| Published in: | Brazilian Journal of Physics |
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| Main Authors: | , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
Sociedade Brasileira de Física
2004
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| Subjects: | |
| Online Access: | https://www.redalyc.org/articulo.oa?id=46434833 |
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