Pulsed power modulators for surface treatment by plasma immersion ion implantation
The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to providenegative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein...
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| Publié dans: | Brazilian Journal of Physics |
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| Auteurs principaux: | , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Sociedade Brasileira de Física
2004
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| Sujets: | |
| Accès en ligne: | https://www.redalyc.org/articulo.oa?id=46434811 |
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