Design and characterization of an RF plasma cleaner
The design and characterization of an innovative device for plasma cleaning, based upon a non-conventional radio-frequency discharge, is described. The RF fields are produced by an antenna placed inside the metallic vacuum chamber. Theoretical models are described to calculate both the electro-magne...
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| Publicat a: | Brazilian Journal of Physics |
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| Autors principals: | , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Sociedade Brasileira de Física
2010
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| Matèries: | |
| Accés en línia: | https://www.redalyc.org/articulo.oa?id=46413563015 |
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