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A Miniature Four-Channel Ion Trap Array Based on Non-silicon MEMS Technology

With the increasing application field, a higher requirement is put forward for the mass spectrometer. The reduction in size will inevitably cause a loss of precision; therefore, it is necessary to develop a high-performance miniature mass spectrometer. Based on the researches of rectangular ion trap...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Zhang, Qi, Lu, Xichi, Chen, Ting, Xiao, Yu, Yao, Rujiao, Yao, Jinyuan
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC8306856/
https://ncbi.nlm.nih.gov/pubmed/34357241
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12070831
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