Nanoscale Bilayer Mechanical Lithography Using Water as Developer

[Image: see text] Sustainability has become a critical concern in the semiconductor industry as hazardous wastes released during the manufacturing process of semiconductor devices have an adverse impact on human beings and the environment. The use of hazardous solvents in existing fabrication proces...

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Detaylı Bibliyografya
Yayımlandı:Nano Lett
Asıl Yazarlar: Shu, Yu, Porter, Benjamin F., Soh, Eugene J. H., Farmakidis, Nikolaos, Lim, Seongdong, Lu, Yang, Warner, Jamie H., Bhaskaran, Harish
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: American Chemical Society 2021
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC8289280/
https://ncbi.nlm.nih.gov/pubmed/33886314
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.nanolett.1c00251
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