Nanoscale Bilayer Mechanical Lithography Using Water as Developer

[Image: see text] Sustainability has become a critical concern in the semiconductor industry as hazardous wastes released during the manufacturing process of semiconductor devices have an adverse impact on human beings and the environment. The use of hazardous solvents in existing fabrication proces...

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Udgivet i:Nano Lett
Main Authors: Shu, Yu, Porter, Benjamin F., Soh, Eugene J. H., Farmakidis, Nikolaos, Lim, Seongdong, Lu, Yang, Warner, Jamie H., Bhaskaran, Harish
Format: Artigo
Sprog:Inglês
Udgivet: American Chemical Society 2021
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC8289280/
https://ncbi.nlm.nih.gov/pubmed/33886314
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.nanolett.1c00251
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