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Nanoscale Bilayer Mechanical Lithography Using Water as Developer
[Image: see text] Sustainability has become a critical concern in the semiconductor industry as hazardous wastes released during the manufacturing process of semiconductor devices have an adverse impact on human beings and the environment. The use of hazardous solvents in existing fabrication proces...
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| Udgivet i: | Nano Lett |
|---|---|
| Main Authors: | , , , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
American Chemical Society
2021
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| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8289280/ https://ncbi.nlm.nih.gov/pubmed/33886314 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.nanolett.1c00251 |
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