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Influence of Deposition Method on the Structural and Optical Properties of Ge(2)Sb(2)Te(5)

Ge2Sb2Te5 (GST-225) is a chalcogenide material with applications in nonvolatile memories. However, chalcogenide material properties are dependent on the deposition technique. GST-225 thin films were prepared using three deposition methods: magnetron sputtering (MS), pulsed laser deposition (PLD) and...

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Publicado en:Materials (Basel)
Autores principales: Simandan, Iosif-Daniel, Sava, Florinel, Buruiana, Angel-Theodor, Galca, Aurelian-Catalin, Becherescu, Nicu, Burducea, Ion, Mihai, Claudia, Velea, Alin
Formato: Artigo
Lenguaje:Inglês
Publicado: MDPI 2021
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Acceso en línea:https://ncbi.nlm.nih.gov/pmc/articles/PMC8269865/
https://ncbi.nlm.nih.gov/pubmed/34209141
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma14133663
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