A carregar...

Anomaly Detection Using Signal Segmentation and One-Class Classification in Diffusion Process of Semiconductor Manufacturing

This paper proposes a new diagnostic method for sensor signals collected during semiconductor manufacturing. These signals provide important information for predicting the quality and yield of the finished product. Much of the data gathered during this process is time series data for fault detection...

ver descrição completa

Na minha lista:
Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Chang, Kyuchang, Yoo, Youngji, Baek, Jun-Geol
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC8200057/
https://ncbi.nlm.nih.gov/pubmed/34199809
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21113880
Tags: Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!