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High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films
In this work, we have developed a new method for manipulating and transferring up to 5 mm × 10 mm epitaxial oxide thin films. The method involves fixing a PET frame onto a PMMA attachment film, enabling transfer of epitaxial films lifted-off by wet chemical etching of a Sr(3)Al(2)O(6) sacrificial la...
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| Publicado en: | Nanomicro Lett |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Springer Nature Singapore
2021
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8187697/ https://ncbi.nlm.nih.gov/pubmed/34138235 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s40820-020-00573-4 |
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