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Single-Crystal Diamond Needle Fabrication Using Hot-Filament Chemical Vapor Deposition

Single-crystal diamonds in the form of micrometer-scale pyramids were produced using a combination of hot-filament (HF) chemical vapor deposition (CVD) and thermal oxidation processes. The diamond pyramids were compared here with similar ones that were manufactured using plasma-enhanced (PE) CVD. Th...

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Bibliografiske detaljer
Udgivet i:Materials (Basel)
Main Authors: Ismagilov, Rinat, Malykhin, Sergei, Puzyr, Aleksey, Loginov, Artem, Kleshch, Victor, Obraztsov, Alexander
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2021
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC8124821/
https://ncbi.nlm.nih.gov/pubmed/33947061
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma14092320
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