Učitavanje...
Magnification inferred curvature for real-time curvature monitoring
The in situ and real-time measurement of curvature changes of optically reflecting surfaces is a key element to better control bottom-up fabrication processes in the semiconductor industry, but also to follow or adjust mirror deformations during fabrication and use for space or optics industries. De...
Spremljeno u:
| Izdano u: | Sci Rep |
|---|---|
| Glavni autori: | , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Nature Publishing Group UK
2021
|
| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8087714/ https://ncbi.nlm.nih.gov/pubmed/33931683 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-021-88722-6 |
| Oznake: |
Dodaj oznaku
Bez oznaka, Budi prvi tko označuje ovaj zapis!
|