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Magnesium Zirconate Titanate Thin Films Used as an NO(2) Sensing Layer for Gas Sensor Applications Developed Using a Sol–Gel Method
Magnesium zirconate titanate (MZT) thin films, used as a sensing layer on Al interdigitated electrodes prepared using a sol–gel spin-coating method, are demonstrated in this study. The p-type MZT/Al/SiO(2)/Si structure for sensing NO(2) is also discussed. The results indicated that the best sensitiv...
Shranjeno v:
| izdano v: | Sensors (Basel) |
|---|---|
| Main Authors: | , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2021
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8073342/ https://ncbi.nlm.nih.gov/pubmed/33923840 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21082825 |
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