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Spectral Ranking of Causal Influence in Complex Systems
Similar to natural complex systems, such as the Earth’s climate or a living cell, semiconductor lithography systems are characterized by nonlinear dynamics across more than a dozen orders of magnitude in space and time. Thousands of sensors measure relevant process variables at appropriate sampling...
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| Publicado no: | Entropy (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8003657/ https://ncbi.nlm.nih.gov/pubmed/33804599 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/e23030369 |
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