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Dual Laser Beam Processing of Semiconducting Thin Films by Excited State Absorption

We present a unique dual laser beam processing approach based on excited state absorption by structuring 200 nm thin zinc oxide films sputtered on fused silica substrates. The combination of two pulsed nanosecond-laser beams with different photon energies—one below and one above the zinc oxide band...

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Detalhes bibliográficos
Publicado no:Materials (Basel)
Main Authors: Wenisch, Christoph, Engel, Sebastian, Gräf, Stephan, Müller, Frank A.
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7961574/
https://ncbi.nlm.nih.gov/pubmed/33800908
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma14051256
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