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Machine learning powered ellipsometry
Ellipsometry is a powerful method for determining both the optical constants and thickness of thin films. For decades, solutions to ill-posed inverse ellipsometric problems require substantial human–expert intervention and have become essentially human-in-the-loop trial-and-error processes that are...
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| Publicat a: | Light Sci Appl |
|---|---|
| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Publishing Group UK
2021
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7952555/ https://ncbi.nlm.nih.gov/pubmed/33707413 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41377-021-00482-0 |
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