Hierarchical Self-Assembly of Thickness-Modulated Block Copolymer Thin Films for Controlling Nanodomain Orientations inside Bare Silicon Trenches

We study the orientation and ordering of nanodomains of a thickness-modulated lamellar block copolymer (BCP) thin film at each thickness region inside a topological nano/micropattern of bare silicon wafers without chemical pretreatments. With precise control of the thickness gradient of a BCP thin f...

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Detalhes bibliográficos
Publicado no:Polymers (Basel)
Main Authors: Shin, Jin Yong, Oh, Young Taek, Kim, Simon, Lim, Hoe Yeon, Lee, Bom, Ko, Young Chun, Park, Shin, Seon, Seung Won, Lee, Se Gi, Mun, Seung Soo, Kim, Bong Hoon
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7918743/
https://ncbi.nlm.nih.gov/pubmed/33668510
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/polym13040553
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