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Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces
Femtosecond laser micromachining (FLM) of fused silica allows for the realization of three-dimensional embedded optical elements and microchannels with micrometric feature size. The performances of these components are strongly affected by the machined surface quality and residual roughness. The pol...
Gardado en:
| Publicado en: | Micromachines (Basel) |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2021
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7918068/ https://ncbi.nlm.nih.gov/pubmed/33670373 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12020180 |
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