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Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

Optical interferometry plays an important role in the topographical surface measurement and characterization in precision/ultra-precision manufacturing. An appropriate surface reconstruction algorithm is essential in obtaining accurate topography information from the digitized interferograms. Howeve...

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Publicado en:Micromachines (Basel)
Autores principales: Wu, Dongxu, Liang, Fusheng, Kang, Chengwei, Fang, Fengzhou
Formato: Artigo
Lenguaje:Inglês
Publicado: MDPI 2021
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Acceso en línea:https://ncbi.nlm.nih.gov/pmc/articles/PMC7915951/
https://ncbi.nlm.nih.gov/pubmed/33567494
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12020164
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