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Experimental Study on Ultrasonic Vibration-Assisted WECDM of Glass Microstructures with a High Aspect Ratio

With the rapid development of micro-electro-mechanical systems (MEMSs), the demand for glass microstructure is increasing. For the purpose of achieving high quality and stable machining of glass microstructures with a high aspect ratio, ultrasonic vibration is applied into the micro-wire electrochem...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Argitaratua izan da:Micromachines (Basel)
Egile Nagusiak: Chen, Yan, Feng, Xu, Xin, Gongming
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: MDPI 2021
Gaiak:
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC7912486/
https://ncbi.nlm.nih.gov/pubmed/33530323
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12020125
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