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Experimental Study on Ultrasonic Vibration-Assisted WECDM of Glass Microstructures with a High Aspect Ratio

With the rapid development of micro-electro-mechanical systems (MEMSs), the demand for glass microstructure is increasing. For the purpose of achieving high quality and stable machining of glass microstructures with a high aspect ratio, ultrasonic vibration is applied into the micro-wire electrochem...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Chen, Yan, Feng, Xu, Xin, Gongming
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7912486/
https://ncbi.nlm.nih.gov/pubmed/33530323
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12020125
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